Study of oxygen self-diffusion in oxides by ion beam techniques : comparison between nuclear reaction analysis and SIMS.

Abstract

Oxygen self-diffusion in Fe,_,0 single crystals has been studied by means of the isotope exchange method in Hz/Hz”0 atmospheres. The ‘*O concentration profiles were determined by using two different techniques based on ion beams: secondary ion mass spectrometry (SIMS) and nuclear reaction analysis (NRA); the latter by means of the narrow nuclear resonance reaction ‘“O(p, o)“N at 629 keV, r = 2.1 keV. The diffusion coefficients obtained from the analysis of the measured profiles are in good agreement with those found in the literature. To compare the depth resolution and sensitivity of both techniques, the “0 profiles of implanted Cr,O, single crystals (Erso = 50 keV, fluence = 1.6 X lOI ions/cm’) were also measured.